Method of producing a layer by arc-evaporation from ceramic cathodes
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May 14, 2013
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Dec 23, 2010
app pub date -
Sep 17, 2008
filing date -
Sep 17, 2007
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Abstract
A method of producing hard wear resistant layer with improved wear resistance. The method is a reactive arc-evaporation based process using a cathode including as main constituent at least one phase of a refractory compound Mn+1AXn (n=1, 2 or 3), wherein M is one or more metals selected from the groups IIIB, IVB, VB, VIB and VIIB of the periodic table of elements, A is one or more elements selected from the groups IIIA, IVA, VA and VIA of the periodic table of elements, and wherein X is carbon and/or nitrogen.
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