Fast measurement of X-ray diffraction from tilted layers
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United States of America Patent
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May 7, 2013
Grant Date -
Jun 7, 2012
app pub date -
Dec 2, 2010
filing date -
Dec 2, 2010
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Abstract
A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.
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