Optical inspection system with polarization isolation of detection system reflections
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United States of America Patent
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May 7, 2013
Grant Date -
Jun 21, 2012
app pub date -
Dec 17, 2010
filing date -
Dec 17, 2010
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Expired
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Abstract
An optical inspection system includes a polarizing isolator that reduces error in measurements by preventing ghost light reflected or scattered from element of a detection subsystem from re-entering the illumination and detection optical paths. The polarizing isolator may include a polarizing splitter that isolates light directionally according the a linear polarization state and two quarter-wave plates for transforming linearly polarized light to circularly polarized light.
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