MEMS-based switching
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United States of America Patent
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May 7, 2013
Grant Date -
Mar 24, 2011
app pub date -
Sep 18, 2009
filing date -
Sep 18, 2009
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Abstract
A MEMS-based switching device may be used to implement an interconnect switch in a programmable integrated circuit device. Such a MEMS-based device may include a deformable cantilever that may form a closed or open circuit to thereby implement switching functionality.
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