Method for characterisation of dielectric layers by ultraviolet photo-emission spectroscopy
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United States of America Patent
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May 7, 2013
Grant Date -
Sep 29, 2011
app pub date -
Sep 15, 2009
filing date -
Sep 17, 2008
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Abstract
The electron affinity of thick dielectrics, of thickness greater than 10 nanometers, is measured by applying a polarization voltage varying between −4V and −40V, for example, and by taking several measuring points to determine a reference value of the photo-emission threshold (ES), applying linear regression to an adjustment straight line (10) linking the measured thresholds (11) to the respective values of the square root of the voltage V.
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