Alignment for edge field nano-imprinting

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United States of America Patent

PATENT NO 8432548
APP PUB NO 20100110434A1
SERIAL NO

12606274

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Abstract

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Systems and methods for alignment of template and substrate at the edge of substrate are described.

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Patent Owner(s)

Patent OwnerAddress
CITIBANK N A388 GREENWICH STREET NEW YORK NY 10013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Byung-Jin Austin, US 194 2163
Nimmakayala, Pawan Kumar Austin, US 20 262
Schumaker, Philip D Austin, US 34 613

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