Film-thickness measuring device using PLL circuit

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United States of America Patent

PATENT NO 8432151
APP PUB NO 20110115467A1
SERIAL NO

13002865

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Abstract

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A phase comparator (4) for detecting a phase difference between a first signal and a second signal, a first oscillating circuit (1) for supplying the phase comparator with a reference signal as the first signal, and a DDS (8) as a second oscillating circuit for outputting a signal according to an output of the above-mentioned phase comparator are provided.

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Patent Owner(s)

Patent OwnerAddress
PIONEER CORPORATION28-8 HONKOMAGOME 2-CHOME BUNKYO-KU TOKYO 113-0021
TOHOKU PIONEER CORPORATION1105 AZA NIKKOH OAZA KUNOMOTO TENDO-SHI YAMAGATA 994-8585

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sato, Hiroaki Yonezawa, JP 264 3890

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