Probe element having a substantially zero stiffness and applications thereof
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United States of America Patent
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Apr 23, 2013
Grant Date -
Jul 14, 2011
app pub date -
Jan 12, 2010
filing date -
Jan 12, 2010
priority date (Note) -
Expired
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Abstract
A microelectronic probe element can include a base, a tip, and a spring assembly coupled between the tip and the base. The spring assembly can include a first spring and a second spring, wherein the first spring has a negative stiffness over a predefined displacement range and the second spring has a positive stiffness over the predefined displacement range. The first spring and second spring can be coupled so that the negative stiffness and positive stiffness substantially cancel to produce a net stiffness of the tip relative to the base over the predefined displacement range.
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