Wire saw slurry recycling process

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8425639
APP PUB NO 20090293369A1
SERIAL NO

12476073

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in a water-based carrier. The method comprises the steps of (a) separating the waste fluid into a first fraction and a second fraction, the first fraction comprising recovered abrasive particles, and the second fraction comprising waste solids and a portion of the water-based carrier; (b) optionally, separating the second fraction to separate the waste solids from the water-based carrier to form a waste solids portion and a recovered water-based carrier portion; (c) optionally, drying the first fraction from step (a) and separating the resulting dried abrasive particles from smaller waste particles to produce a purified recovered abrasive fraction; and (d) suspending particles of the first fraction from step (a), the purified recovered abrasive fraction from step (c), or both, in a suspending medium comprising at least a portion of the recovered water-based carrier from step (b), to generate a recycled water-based wire saw cutting slurry.

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Patent Owner(s)

Patent OwnerAddress
CABOT MICROELECTRONICS CORPORATION870 NORTH COMMONS DRIVE AURORA IL 60504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Batllo, Francois Burr Ridge, US 14 79
Gaudet, Gregory Neward, US 3 20
Grumbine, Steven Aurora, US 42 315
Naguib, Nevin Aurora, US 3 22

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