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Abstract

A microelectromechanical sensor and operating method therefor. The sensor has at least one movable electrode. An electrode arrangement is spaced apart from the movable electrode with a plurality of electrodes that can be driven separately and to which corresponding electrode signals can be applied that can be used to electrostatically set/change the application of force, the spring constant and the read-out factor of the movable electrode. An electrode signal generation unit is connected to the electrode arrangement and can be supplied with a force application signal, a spring constant signal and a read-out factor signal, which define the settings/changes to be brought about with regard to the application of force, spring constant and read-out factor of the movable electrode. The electrode signal generation unit generates each electrode signal in a manner dependent on the force application signal, the spring constant signal and the read-out factor signal and matches the electrode signals to one another so that the application of force, the spring constant and the read-out factor of the movable electrode can be set/changed to specific desired values independently of one another.

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First Claim