Piezoelectric vibrator, oscillator, electronic equipment timepiece, and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator
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United States of America Patent
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Apr 16, 2013
Grant Date -
Aug 11, 2011
app pub date -
Feb 25, 2011
filing date -
Aug 27, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A piezoelectric vibrator according to the invention includes a base substrate and a lid substrate which are connected to each other and have a cavity formed therebetween; a piezoelectric vibrating reed that is mounted on the base substrate in the cavity; an external electrode that is formed on a lower surface of the base substrate; and a through electrode which is formed so as to pass through the base substrate, maintain the airtightness in the cavity, and electrically connect the piezoelectric vibrating reed with the external electrode. The through electrode is formed by a press molding by a forming mold having a pin, and includes a through hole of a taper-shaped section, in which a taper angle is in the range of 15° or more and 20° or less, and a conductive paste that is hardened after being filled in the through hole.
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