Temperature measuring device, thermal treatment device using the same, temperature measuring method
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United States of America Patent
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Apr 16, 2013
Grant Date -
Apr 8, 2010
app pub date -
Jul 4, 2006
filing date -
Jul 5, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A temperature measuring apparatus and a temperature measuring method, comprising a light intensity measuring unit, a calculation unit, and a temperature output unit; wherein an object to be heated having a uniquely defined correlation between temperature and refractive index is irradiated with a probe laser beam in the light intensity measuring unit, and a light intensity property is determined which represents a relationship between time and light intensity of a reflected light or a transmitted light occurring as a result of interference of the multiply-reflected probe laser beam within the object to be heated. In the calculation unit, a virtual object to be heated having equivalent dimensional, thermal, and optical characteristics to those of the object to be heated is subjected to a thermal incidence equivalent to the heating conditions of the object to be heated. A light intensity property of the virtual object to be heated is irradiated with a probe laser beam having an equivalent property to said probe laser beam is acquired, and a virtual object to be heated having a light intensity property is obtained as a replicated object to be heated. The temperature output unit acquires temperature of the object to be heated at a predetermined position thereon at a predetermined time on the basis of the replicated object to be heated.
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