Processing system
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United States of America Patent
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Apr 9, 2013
Grant Date -
Oct 25, 2012
app pub date -
Apr 20, 2012
filing date -
Apr 21, 2011
priority date (Note) -
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Abstract
A processing system includes a piping which extends annularly, such as in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region. The piping includes, on a side which faces the interaction region, a plurality of exit openings for the gas towards the interaction region. The piping also includes a holder configured to pivot the piping about a pivot axis. The holder is parallel to the tilt axis of the object holder.
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