Low temperature CNT growth using gas-preheat method
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United States of America
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Apr 9, 2013
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app pub date -
Feb 26, 2010
filing date -
Feb 26, 2010
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Abstract
A method for synthesizing carbon nanotubes (CNT) comprises the steps of providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes; and passing a substrate through the growth chamber; and introducing a feed gas into the growth chamber pre-heated to a second temperature sufficient to dissociate at least some of the feed gas into at least free carbon radicals to thereby initiate formation of carbon nanotubes onto the substrate.
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International Classification(s)
- 2010 Application Filing Year
- C23C Class
- 1580 Applications Filed
- 1036 Patents Issued To-Date
- 65.57 % Issued To-Date
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- C23C Class
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- 12 Age