Particle beam device with deflection system
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United States of America Patent
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Mar 26, 2013
Grant Date -
Jun 7, 2012
app pub date -
Nov 29, 2011
filing date -
Dec 3, 2010
priority date (Note) -
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Abstract
A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective lens. In a first operating mode, the first deflection system generates a first deflection field and the second deflection system generates a second deflection field. In a second operating mode, the first deflection system generates a third deflection field and the second deflection system generates a fourth deflection field.
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