Probe holder
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Mar 26, 2013
Issued Date -
N/A
app pub date -
Oct 10, 2008
filing date -
Oct 10, 2007
priority date (Note) -
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Abstract
A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.
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