MEMS actuator device with integrated temperature sensors
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United States of America Patent
Stats
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Mar 19, 2013
Grant Date -
Apr 21, 2011
app pub date -
Oct 15, 2009
filing date -
Oct 15, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.
First Claim
Other Claims data not available
