Plasma sources
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United States of America Patent
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Mar 19, 2013
Grant Date -
May 6, 2010
app pub date -
Jul 6, 2007
filing date -
Jul 20, 2006
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Abstract
This invention relates to a plasma source in the form of plasma generator (13) which utilizes an antenna (11) and an RF source (12). The generated plasma flows into a chamber (14) and ions are accelerated out of the chamber (14) by grid (15). A body 16 is located in the volume for creating local losses and thereby reducing local plasma density.
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