Scanning electron microscope and CD measurement calibration standard specimen
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United States of America Patent
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Mar 19, 2013
Grant Date -
Nov 6, 2008
app pub date -
Jun 30, 2008
filing date -
Jun 25, 2004
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Abstract
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.
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