Systems and methods for forming a time-averaged line image
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United States of America Patent
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Mar 19, 2013
Grant Date -
Apr 26, 2012
app pub date -
Aug 10, 2011
filing date -
Oct 22, 2010
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Abstract
Systems and methods for forming a time-average line image are disclosed. The method includes forming a line image with a first amount of intensity non-uniformity. The method also includes forming and scanning a secondary image over at least a portion of the line image to form a time-averaged modified line image having a second amount of intensity non-uniformity that is less than the first amount. Wafer emissivity is measured in real time to control the intensity of the secondary image. Temperature is also measured in real time based on the wafer emissivity and reflectivity of the secondary image, and can be used to control the intensity of the secondary image.
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