In-situ deposition of battery active lithium materials by thermal spraying

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United States of America Patent

PATENT NO 8399065
APP PUB NO 20110045170A1
SERIAL NO

12862265

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Abstract

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A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising electrochemically active precursor particles dispersed in a carrying medium is provided to a processing chamber and thermally treated using a combustible gas mixture also provided to the chamber. The precursor is converted to nanocrystals by the thermal energy, and the nanocrystals are deposited on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bachrach, Robert Z Burlingame, US 64 1390
Bolandi, Hooman San Jose, US 21 429
Brown, Karl M San Jose, US 47 1713
Chen, Liang-Yuh Foster City, US 187 3064
Ishikawa, Tetsuya Saratoga, US 358 14699
Olgado, Donald J K Palo Alto, US 38 976
Pebenito, Victor San Jose, US 10 247
Shang, Quanyuan Saratoga, US 104 6343
Yang, Lu Milpitas, US 115 358

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