Turbomolecular pump
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United States of America Patent
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Mar 19, 2013
Grant Date -
Sep 22, 2005
app pub date -
Mar 14, 2005
filing date -
Mar 16, 2004
priority date (Note) -
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Abstract
A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.
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