Method for forming diamond-like carbon film
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United States of America Patent
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Mar 12, 2013
Grant Date -
May 21, 2009
app pub date -
Jul 17, 2008
filing date -
Nov 20, 2007
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Abstract
Provided is a method for forming a diamond-like carbon (DLC) film capable of enhancing the adhesion strength of a diamond-like carbon (DLC) film by simple steps. A surface of a substrate 11 made of polytetrafluoroethylene (PTFE) is modified by plasma radiation, and a diamond-like carbon film 12 is formed on the modified PTFE substrate 11 surface by chemical vapor deposition.
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