Piezoresistor height sensing cantilever
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United States of America Patent
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Mar 5, 2013
Grant Date -
Apr 22, 2010
app pub date -
May 13, 2009
filing date -
May 13, 2008
priority date (Note) -
Expired
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Abstract
A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
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