Silicon-ceramic composite substrate
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United States of America Patent
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Mar 5, 2013
Grant Date -
Oct 7, 2010
app pub date -
Dec 4, 2008
filing date -
Dec 6, 2007
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Abstract
A silicon-ceramic composite substrate includes a low-temperature ceramic having at least one pre-formed ceramic layer and a silicon substrate. The low-temperature ceramic forms a carrier layer and the silicon substrate surface has a contact area with nanostructures) that completely penetrate into the low-temperature ceramic.
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