Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
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United States of America Patent
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Mar 5, 2013
Grant Date -
Nov 18, 2010
app pub date -
May 11, 2010
filing date -
May 12, 2009
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Abstract
A method for calibrating a pyrometer a temperature of a calibration sample is determined from the ratio of a first reflectance and a second reflectance and the pyrometer is calibrated by assigning the determined temperature of the calibration sample with a thermal radiation signal measured by the pyrometer.
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