Micro-scale and meso-scale hydraulically or pneumatically powered devices capable of rotational motion
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United States of America Patent
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Feb 26, 2013
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app pub date -
Jul 7, 2008
filing date -
Dec 3, 2001
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Abstract
Embodiments are directed to micro-scale or meso-scale devices having hydraulic or pneumatic actuation mechanisms incorporating bearings elements (such as ball bearings, cylindrical bearings, interference bearings, or hydrostatic bearings. Devices of some embodiments are turbines. Some devices may function as medical devices. Other embodiments are directed to multi-layer, multi-material electrochemical fabrication methods for producing such devices.
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