Electron emitter and field emission device provided with electron emitter
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United States of America Patent
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Feb 19, 2013
Grant Date -
May 19, 2011
app pub date -
Jul 30, 2009
filing date -
Jul 31, 2008
priority date (Note) -
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Abstract
An electron emitter includes a guard electrode 13 on the outer circumferential side of a carbon film structure 10 which is formed on a substrate 7 by plasma CVD method. This guard electrode 13 includes a curved surface portion (a curved surface portion that curves from top toward a side opposite to the film-forming direction) 13a convex in a film-forming direction of the carbon film structure 10. A curvature radius R1 of an outer-circumferential-side portion of the curved surface portion 13a is larger than or equal to a curvature radius R2 of a carbon-film-structure-side portion of the curved surface portion 13a.
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