Damage detection apparatus, damage detection method and recording medium
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United States of America Patent
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Feb 12, 2013
Grant Date -
Jul 30, 2009
app pub date -
Jan 31, 2007
filing date -
Jan 31, 2006
priority date (Note) -
Expired
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Abstract
A damage detection apparatus and method which detect a damage occurring in a specimen include energizing an inspection area on a specimen into a predetermined energized condition, measuring a potential difference at predetermined intervals in the inspection area, and analyzing an existence or otherwise of a damage, and a shape thereof, based on a plurality of items of potential difference data. Parameters specifying a hypothetical damage are hypothesized in advance and, based on the potential difference data, calculation is executed using a maximum likelihood estimation method on a double body in which hypothetical specimens are doubled by bringing together their front surfaces, and furthermore on a quadruple body quadrupled by bringing rear surfaces of hypothetical specimens together, a maximum likelihood estimation value of the parameters is calculated.
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