Apparatus and method for investigating a sample
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United States of America Patent
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Feb 12, 2013
Grant Date -
Jul 7, 2011
app pub date -
Jul 13, 2010
filing date -
May 20, 2004
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Abstract
An apparatus for investigating a sample comprising: a source of beam radiation; a detector for detecting a beam of radiation reflected by the sample and an optical subsystem for manipulating the beam between source and detector wherein the optical subsystem comprises a first optical element arranged in use to angularly deflect the source beam within a given solid angle and a second optical element arranged to focus the beam from the first optical element onto a substantially flat image plane and wherein radiation reflected by the sample passes back through the first and second optical elements to the detector.
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