Indium tin oxide target, method for manufacturing the same, transparent conductive film of indium tin oxide, and method for manufacturing transparent conductive film of indium tin oxide
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United States of America Patent
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Feb 12, 2013
Grant Date -
Mar 24, 2011
app pub date -
Nov 24, 2010
filing date -
Dec 14, 2007
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Abstract
Disclosed are an indium Tin Oxide (ITO) target, a method for manufacturing the same, a transparent conductive film of ITO, and a method for manufacturing the transparent conductive film of ITO. The ITO target includes at least one oxide selected from the group consisting of Sm2O3 and Yb2O3, wherein an amount of the oxide is about 0.5 wt. % to about 10 wt. % based on the weight of the target.
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