Method and apparatus for showerhead cleaning
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United States of America Patent
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Feb 12, 2013
Grant Date -
Mar 17, 2011
app pub date -
Sep 14, 2010
filing date -
Sep 15, 2009
priority date (Note) -
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Abstract
Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.
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