Method and apparatus for extracting ions from an ion source for use in ion implantation
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United States of America Patent
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Feb 5, 2013
Grant Date -
May 6, 2010
app pub date -
Dec 29, 2006
filing date -
Dec 12, 2003
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Abstract
Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.
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