Method and arrangement for realizing a vacuum in a vacuum chamber
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United States of America Patent
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Feb 5, 2013
Grant Date -
Oct 28, 2010
app pub date -
Feb 22, 2010
filing date -
Feb 22, 2009
priority date (Note) -
Expired
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Abstract
The invention relates to a method of realizing a vacuum in a vacuum chamber. The vacuum chamber is connected to a pumping system shared by a plurality of vacuum chambers. The method includes separately pumping down each vacuum chamber. The invention further relates to n arrangement of a plurality of vacuum chambers connected to a pumping system. In this arrangement, the pumping system is arranged for pumping down each vacuum chamber separately.
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