Rotation rate sensor
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United States of America Patent
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Feb 5, 2013
Grant Date -
Jun 10, 2010
app pub date -
Mar 28, 2008
filing date -
Jun 29, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.
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