Original data producing method and original data producing program
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United States of America Patent
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Jan 29, 2013
Grant Date -
Feb 28, 2008
app pub date -
Jul 10, 2007
filing date -
Jul 12, 2006
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Abstract
A two-dimensional transmission cross coefficient is obtained based on a function representing a light intensity distribution formed by an illumination apparatus on a pupil plane of the projection optical system and a pupil function of the projection optical system. Based on the two-dimensional transmission cross coefficient and data of a pattern on an object plane of the projection optical system, an approximate aerial image is calculated by using at least one of plural components of an aerial image on an image plane of the projection optical system. Data of a pattern of an original is produced based on the approximate aerial image.
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