Electrostatic chuck and apparatus having the same
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United States of America Patent
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Jan 29, 2013
Grant Date -
Jun 4, 2009
app pub date -
Oct 22, 2008
filing date -
Dec 3, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An electrostatic chuck and an apparatus having the electrostatic chuck are provided. The electrostatic chuck may attract a substrate during a substrate assembling process for manufacturing a flat display panel. An elastic layer made of an elastic material may be provided in a base part of the electrostatic chuck, thus preventing non-uniform stress from being distributed on the substrate due to external force, therefore maintaining the flatness of the substrate and improving the quality of assembled substrates. The electrostatic chuck may include an electrostatic force generating part provided on an upper surface of the base part, the force generating part including an insulating layer, an electrode layer, a dielectric layer. The base part may be provided with the elastic layer made of the elastic material having elastic restoring force.
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