MEMS mirror system for laser printing applications

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United States of America Patent

PATENT NO 8361331
APP PUB NO 20110111544A1
SERIAL NO

13009964

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.

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Patent Owner(s)

Patent OwnerAddress
MIRADIA INCSANTA CLARA CA

International Classification(s)

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  • 2011 Application Filing Year
  • H01L Class
  • 19146 Applications Filed
  • 15997 Patents Issued To-Date
  • 83.56 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20112012201320142015201620172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Dongmin Saratoga, US 58 1238
Wang, Ye Cupertino, US 193 3164
Worley,, III William Spencer Half Moon Bay, US 59 2352
Yang, Xiao Cupertino, US 235 3886

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Patent Citation Ranking

  • 2 Citation Count
  • H01L Class
  • 4.91 % this patent is cited more than
  • 12 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges4074140169277539225214911984534318001 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0250500750100012501500175020002250250027503000325035003750400042504500

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