MEMS mirror system for laser printing applications
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jan 29, 2013
Grant Date -
May 12, 2011
app pub date -
Jan 20, 2011
filing date -
Jan 26, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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MIRADIA INC | SANTA CLARA CA |
International Classification(s)

- 2011 Application Filing Year
- H01L Class
- 19146 Applications Filed
- 15997 Patents Issued To-Date
- 83.56 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Chen, Dongmin | Saratoga, US | 58 | 1238 |
# of filed Patents : 58 Total Citations : 1238 | |||
Wang, Ye | Cupertino, US | 193 | 3164 |
# of filed Patents : 193 Total Citations : 3164 | |||
Worley,, III William Spencer | Half Moon Bay, US | 59 | 2352 |
# of filed Patents : 59 Total Citations : 2352 | |||
Yang, Xiao | Cupertino, US | 235 | 3886 |
# of filed Patents : 235 Total Citations : 3886 |
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Patent Citation Ranking
- 2 Citation Count
- H01L Class
- 4.91 % this patent is cited more than
- 12 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Sep 09, 2010 | FPAY | FEE PAYMENT | year of fee payment: 12 |
Oct 16, 2006 | FPAY | FEE PAYMENT | year of fee payment: 8 |
Jan 15, 2003 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Jan 15, 2003 | SULP | SURCHARGE FOR LATE PAYMENT | |
Nov 06, 2002 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Apr 20, 1999 | I | Issuance | |
Apr 14, 1999 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Nov 03, 1997 | F | Filing | |
Oct 27, 1997 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:VIOLA, MARTA EMANUELA;REEL/FRAME:008878/0752 Owner name: PRIMA S.R.L, ITALY Effective Date: Oct 27, 1997 |
Nov 13, 1996 | PD | Priority Date |

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