Scribing apparatus and scribing method
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United States of America Patent
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Jan 29, 2013
Grant Date -
Nov 24, 2011
app pub date -
Feb 22, 2010
filing date -
Feb 24, 2009
priority date (Note) -
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Abstract
An object is to scribe a small-sized substrate made of a brittle material with high workability. A plurality of brittle material-made substrates 107a to 107i are arranged on the table 106 while being positioned by their respective positioning pins 109. A recipe data table is prepared in advance for each of the brittle material-made substrates on an individual basis. On the basis of the recipe data table, the brittle material-made substrate and the scribing head are moved relatively to each other to perform inside scribing or outside scribing on each of the substrates. This makes it possible to subject a plurality of substrates to scribing operation at one time under automatic control.
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