MEMS tunneling accelerometer
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United States of America Patent
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Jan 8, 2013
Grant Date -
Dec 29, 2011
app pub date -
Jun 29, 2010
filing date -
Jun 29, 2010
priority date (Note) -
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Abstract
A tunneling accelerometer includes a proof mass that moves laterally with respect to a cap wafer. Either the proof mass or the cap wafer includes a plurality of tunneling tips such that the remaining one of proof mass and the cap wafer includes a corresponding plurality of counter electrodes. The tunneling current flowing between the tunneling tips and the counter electrodes will thus vary as the proof mass laterally displaces in response to an applied acceleration.
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