Resonance compensation in scanning probe microscopy
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 1, 2013
Grant Date -
Nov 24, 2011
app pub date -
May 24, 2010
filing date -
May 24, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method includes generating, using a sensor, a data signal. The data signal includes a first component based on a motion in a first direction of an actuator configured to provide motion between a sample and a probe in the first direction, the first direction substantially in the plane of the sample; and a second component based on at least one of topographic variations of the sample in a second direction, and a materials property of the sample. The method further includes generating, using a processor, a compensatory signal based on the first component of the data signal generated by the sensor; and providing the compensatory signal to the actuator.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully