Optical inspection system and method
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United States of America Patent
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Jan 1, 2013
Grant Date -
Feb 24, 2011
app pub date -
Oct 29, 2010
filing date -
Apr 4, 2008
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Abstract
An inspection system includes imaging optics for imaging an object plane into an image plane. The imaging optics include an objective lens having positive optical power, a first lens group having negative optical power, and a second lens group having positive optical power. The optical elements are arranged along a common unfolded optical axis with a pupil plane of the imaging optics located between the first lens group and the second lens group.
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