Fabricating a graphene nano-device
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United States of America Patent
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Jan 1, 2013
Grant Date -
Feb 11, 2010
app pub date -
Sep 15, 2008
filing date -
Aug 5, 2008
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Abstract
Nanoscale graphene structure fabrication techniques are provided. An oxide nanowire useful as a mask is formed on a graphene layer and then ion beam etching is performed. A nanoscale graphene structure is fabricated by removing a remaining oxide nanowire after the ion beam etching.
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