Reflective optical element for use in an EUV system
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United States of America Patent
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Jan 1, 2013
Grant Date -
Mar 3, 2011
app pub date -
Aug 5, 2010
filing date -
Aug 31, 2009
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Abstract
A reflective optical element for use in an EUV system is disclosed. The reflective optical element includes a base body, which is produced at least partly from a substrate material. At least one cooling channel through which a cooling medium can flow is arranged in the base body. A material having a thermal conductivity of greater than 50 W/mK is provided as substrate material. The reflective optical element also includes a polishing layer, which is applied on the substrate material. The polishing layer includes an amorphous material which can be processed via polishing.
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