Turbomolecular pump
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 25, 2012
Grant Date -
Jan 13, 2011
app pub date -
Jul 9, 2009
filing date -
Jul 22, 2008
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An object is to provide a turbomolecular pump with rotor and stator blades alternatively arranged that can prevent collision between the adjacent rotor and stator blades due to air inrush, which may take place due to vacuum break in a system operation, prevent excessive centrifugal force to a hub portion of a rotor, and further enhance pumping performance. A blade cross sectional profile taken along the circumferential direction of each of the rotor blades of a rotor blade stage has an upstream portion curved convexly backward in a rotational direction of the rotor and a downstream portion curved convexly forward in the rotational direction of the rotor, thereby forming the blade cross sectional profile into an S-shape or inversed S-shape.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully