Polishing apparatus and method of polishing work
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United States of America Patent
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Dec 18, 2012
Grant Date -
May 17, 2007
app pub date -
Nov 14, 2006
filing date -
Nov 15, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The method of polishing a work is capable of reducing a polishing cost, polishing a surface of the work with high polishing accuracy and easily disposing used polishing liquid and used washing liquid. The method comprises the steps of: pressing the work onto a polishing member; feeding polishing liquid; and relatively moving the work with respect to the polishing member. Electrolytic reduced water produced by electrolyzing an electrolyte solution is used as the polishing liquid.
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