Semiconductor test instrument and the method to test semiconductor
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United States of America Patent
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Dec 11, 2012
Grant Date -
Oct 28, 2010
app pub date -
Feb 25, 2010
filing date -
Apr 24, 2009
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Abstract
A semiconductor examination apparatus includes an energy source device that supplies a semiconductor substrate having a pn junction with excitation energy that causes luminescence in the semiconductor substrate, an image capturing device that captures a first luminescence image of the semiconductor substrate supplied with first excitation energy and a second luminescence image of the semiconductor substrate supplied with second excitation energy that is different in magnitude from the first excitation energy, a luminescence image processing device that calculates the difference in luminescence intensity between the first luminescence image and the second luminescence image at positions on the semiconductor substrate and generates intensity difference image data, and a detecting device that detects a crack position of a crack occurring in the semiconductor substrate on the basis of determination values based on the magnitude of the difference on the intensity difference image data.
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