Hybrid material inversion mode GAA CMOSFET

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8330228
APP PUB NO 20110254101A1
SERIAL NO

12810694

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Abstract

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A Ge and Si hybrid material inversion mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a circular-shaped cross section and are formed of n-type Ge and p-type Si, respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. In an inversion mode, current flows through the overall cylindrical channel, so as to achieve high carrier mobility, reduce low-frequency noises, prevent polysilicon gate depletion and short channel effects and increase the threshold voltage of the device.

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Patent Owner(s)

Patent OwnerAddress
SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY CHINESE ACADEMY OF SCIENCES200050 NO 865 CHANGNING ROAD SHANGHAI CHANGNING DISTRICT SHANGHAI CITY SHANGHAI CITY 200050

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jing Shanghai, CN 545 3366
Wang, Xi Shanghai, CN 356 3114
Xiao, Deyuan Shanghai, CN 246 634
Xue, Zhongying Shanghai, CN 28 119
Zhang, Miao Shanghai, CN 114 550

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