System for maintaining thermal stability of a motion stage
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United States of America Patent
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Dec 4, 2012
Grant Date -
Aug 5, 2010
app pub date -
Feb 5, 2009
filing date -
Feb 5, 2009
priority date (Note) -
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Abstract
A system for maintaining thermal stability of a motion stage driven by a motor comprises a motion current generator operative to produce a motion current to drive the motion stage to move and a thermal current generator operative to produce a thermal current to dissipate heat in the motion stage for controlling a temperature of the motion stage without producing corresponding movement of the motion stage. A summation controller is operative to combine the motion current with the thermal current, and to produce a combined current output to the motor.
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