Method for contactless capacitive thickness measurements
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United States of America Patent
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Nov 20, 2012
Grant Date -
Oct 7, 2010
app pub date -
Aug 19, 2008
filing date -
Aug 30, 2007
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Abstract
A method for contactless capacitive thickness measurement of a flat material (10) that is placed in the fringe field (32) of a capacitor (C1,C2), with simultaneous measurement of the width L of an air gap (16) between the flat material and the capacitor plates, in which the capacities gL, kL of two capacitors (C1, C2) are measured whose fringe fields (32) decay at different rates towards the flat material (10), and in that both, the thickness D of the flat material (10) and the width L of the air gap (16) are determined on the basis of the condition that, for each capacitor (C1, C2), the measured capacity gL, kL is equal to the integral of the capacity gradient g′, k′ over the thickness of the flat material (10).
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